专利名称:Apparatus and method for measuring
spectral
发明人:石丸 伊知郎申请号:JP2016571942申请日:20160115公开号:JP6660634B2公开日:20200311
摘要:A spectrometry device according to the present invention is provided with: alight source 101 that causes p-polarized light, which is linearly polarized light having anelectric field vibration direction parallel to the incidence surface, to be incident on thesurface of an object of measurement at Brewster's angle; an introduction optical system103 for introducing measurement light emitted from the object of measurement struckby the p-polarized light into a phase shifter 105 and dividing the same into twomeasurement light beams; an interference light optical system 106 for forming
interference light from the two measurement light beams; an interference light detectionunit 107 for detecting the intensity of the interference light; a processing unit 201 forcreating an interferogram of the measurement light on the basis of the intensity variationof the interference light obtained through the driving of the phase shifter 105; and acalculation unit 202 for obtaining a measurement light spectrum by applying the Fouriertransform to the measurement light interferogram.
申请人:国立大学法人 香川大学
地址:香川県高松市幸町1番1号
国籍:JP
代理人:特許業務法人京都国際特許事務所
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